Showerhead apparatus for a linear batch chemical vapor deposition system

An apparatus comprising:

• a deposition chamber;
• a stationary substrate carrier disposed in the deposition chamber and having a plurality of receptacles each configured to receive a planar disc substrate on an exposed surface of an intermediate substrate carrier disposed in each said receptacle, said plurality of receptacles arranged in a linear configuration;
• a moveable showerhead, disposed in the deposition chamber and above said stationary substrate carrier, having a showerhead conduit to conduct a first precursor gas along a length of the showerhead, a channel along a surface of the showerhead and disposed parallel to the length, and at least one opening between the showerhead conduit and the channel to supply the first precursor gas from the showerhead conduit to the channel;
• a gas supply conduit having an end in communication with the showerhead conduit and an opposite end configured to receive the first precursor gas;
• a translation mechanism in communication with the showerhead and configured to translate the showerhead in a forward motion and a reverse motion in a direction of motion that is parallel to a width of the showerhead, said translation mechanism comprising a motor-driven lead screw mechanically coupled to a moveable mounting plate, the mounting plate coupled to a pair of parallel rigid arms at a first end of said rigid arms, the rigid arms further joined to said moveable showerhead at a second end of said rigid arms, the pair of rigid arms only passing through a first wall of said deposition chamber;
• and
• a stationary showerhead, disposed in the deposition chamber and above said moveable showerhead, the stationary showerhead having a plurality of slots or holes from which a second precursor gas is directed downward toward the receptacles,
• wherein the first precursor gas received at the gas supply conduit is provided along a length of the channel, the translation mechanism translating the showerhead according to a movement of said motor-driven lead screw.