Protecting a target pump interior with an ALD coating
AssigneePicosun Oy
InventorsTimo Malinen, Harri Vähämäki
Life of this patent
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Abstract
An apparatus and method for protecting a target pump interior, where a target pump (10) inlet is provided with an inlet manifold (20) and a target pump outlet with an exhaust manifold (30). The target pump interior is exposed to sequential self-saturating surface reactions by sequential inlet of reactive gases according to an ALD method via the inlet manifold into the target pump interior and outlet of reaction residue via the exhaust manifold, while the target pump is kept running or not running. A technical effect of the invention is protecting a pump interior, which can be also an assembled pump interior, by a conformal protective coating.
Claims16
A method for protecting a target pump interior, the method comprising:
- providing a target pump inlet with an inlet manifold and a target pump outlet with an exhaust line by attaching the inlet manifold to the target pump inlet and attaching the exhaust line to the target pump outlet;
- exposing the target pump interior to sequential self-saturating surface reactions by sequential inlet of reactive gases via the inlet manifold into the target pump interior and outlet of reaction residue via the exhaust line while the target pump is kept running;
- and
- detaching the inlet manifold from the target pump inlet and detaching the exhaust line from the target pump outlet.
A method for protecting a target pump interior, the method comprising:
- providing a target pump inlet with an inlet manifold and a target pump outlet with an exhaust line by attaching the inlet manifold to the target pump inlet and attaching the exhaust line to the target pump outlet;
- exposing the target pump interior to sequential self-saturating surface reactions by sequential inlet of reactive gases via the inlet manifold into the target pump interior and outlet of reaction residue via the exhaust line while the target pump is not running;
- and
- detaching the inlet manifold from the target pump inlet and detaching the exhaust line from the target pump outlet.
Dependencies are inferred from the claim text.