Systems and methods for MEMS-based cross-point electrical switching

An Microelectromechanical systems (MEMS)-based system, comprising:

• one or more first die comprising a plurality of Radio Frequency (RF) MEMS switches selectively electrically interconnecting N inputs arranged in rows to M outputs arranged in columns in a cross-point switch, wherein the N inputs and the M outputs are each at least 10 Gbps and switched through the plurality of RF MEMS switches and N and M are at least 32, wherein each of the plurality of RF MEMS switches are one of closed for RF signals to flow there through and open to block the RF signals, wherein the plurality of RF MEMS switches are at an intersection of each row and column, and wherein each intersection is formed by one of two RF MEMS switches and three RF MEMS switches;
• a second die comprising control and addressing circuitry to selectively control the plurality of RF MEMS switches to electrically switch each of the N inputs to a corresponding output of the M outputs;
• and
• interconnections between the one or more first die and the second die through silicon vias, micro bumps, or metal pillars.

A method, comprising:

• providing one or more of N inputs each at least 10 Gbps to a Microelectromechanical systems (MEMS)-based N×M cross-point switch comprising a plurality of RF MEMS switches, where N and M are at least 32, wherein each of the plurality of RF MEMS switches are one of closed for RF signals to flow there through and open to block the RF signals;
• configuring control and addressing circuitry located on a separate substrate from the plurality of RF MEMS switches;
• and
• selectively electrically switching, at the at least 10 Gbps, the one or more of N inputs to one or more of M outputs each at least 10 Gbps based on the configuration of the control and addressing circuitry,
• wherein the N inputs are arranged in rows, the M outputs are arranged in columns, and the plurality of RF MEMS switches are at an intersection of each row and column, and wherein each intersection is formed by one of two RF MEMS switches and three RF MEMS switches.