Ultrasonic transducer device, probe, electronic instrument, and ultrasonic diagnostic device
AssigneeSeiko Epson Corporation
InventorsKanechika Kiyose, Hironori Suzuki, Hiroshi Matsuda
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Abstract
An ultrasonic transducer device includes a base, a plurality of piezoelectric elements, a conductive body and an insulating film. The base has a plurality of vibrating film portions arranged in an array pattern. The piezoelectric elements are respectively disposed on the vibrating film portions. The conductive body is disposed on the base, and arranged inside and outside of an area corresponding to each of the vibrating film portions in a plan view as viewed along a thickness direction of the base. The insulating film is disposed on the conductive body only at outside of the area corresponding to each of the vibrating film portions in the plan view.
Claims20
An ultrasonic transducer device comprising:
- a base having a plurality of vibrating film portions arranged in an array pattern;
- a plurality of piezoelectric elements respectively disposed on the vibrating film portions;
- a conductive body disposed on the base, and arranged inside and outside of an area corresponding to each of the vibrating film portions in a plan view as viewed along a thickness direction of the base;
- a first insulating film disposed on the conductive body only at outside of the area corresponding to each of the vibrating film portions in the plan view;
- and
- a second insulating film having a film thickness smaller than a film thickness of the first insulating film, and disposed at least partially on each of the piezoelectric elements and only at inside of the area corresponding to each of the vibrating film portions in the plan view.
An ultrasonic transducer device comprising:
- a base having a plurality of openings and a plurality of vibrating film portions arranged in an array pattern, the plurality of the vibrating film portions being respectively disposed on the openings at inside of an area corresponding to each of the openings in a plan view as viewed along a thickness direction of the base, each of the openings having a rectangular shape defined by a pair of long sides and a pair of short sides in the plan view;
- a plurality of piezoelectric elements respectively disposed on the vibrating film portions;
- a conductive body disposed on the base, and arranged inside and outside of an area corresponding to each of the vibrating film portions in the plan view;
- and
- an insulating film covering outside of the area corresponding to each of the vibrating film portions and only a portion of each of the long sides of the openings in the plan view.
An ultrasonic transducer device comprising:
- a base having a plurality of vibrating film portions arranged in an array pattern;
- a plurality of piezoelectric elements respectively disposed on the vibrating film portions;
- a conductive body disposed on the base, and arranged inside and outside of an area corresponding to each of the vibrating film portions in a plan view as viewed along a thickness direction of the base, the conductive body covering an upper surface of each of the piezoelectric elements;
- and
- an insulating film disposed on an upper surface of the conductive body at outside of the area corresponding to each of the vibrating film portions in the plan view.
Dependencies are inferred from the claim text.