Pillar array structure with uniform and high aspect ratio nanometer gaps
AssigneeInternational Business Machines Corporation
InventorsYann A. Astier, Robert L. Bruce, Joshua T. Smith, Chao Wang, Benjamin H. Wunsch
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Abstract
A technique related to sorting entities is provided. An inlet is configured to receive a fluid, and an outlet is configured to exit the fluid. A nanopillar array, connected to the inlet and the outlet, is configured to allow the fluid to flow from the inlet to the outlet. The nanopillar array includes nanopillars arranged to separate entities by size. The nanopillars are arranged to have a gap separating one nanopillar from another nanopillar. The gap is constructed to be in a nanoscale range.
Claims9
A method of providing a fluidic apparatus, the method comprising:
- providing an inlet configured to receive a fluid;
- providing an outlet configured to exit the fluid;
- coupling a nanopillar array to the inlet and the outlet, the nanopillar array configured to allow the fluid to flow from the inlet to the outlet;
- wherein the nanopillar array includes nanopillars arranged to separate entities by size;
- wherein the nanopillars are arranged to have a gap separating one nanopillar from another nanopillar;
- wherein the gap is constructed to be in a nanoscale range;
- and
- wherein an oxide layer on the nanopillars causes unevenness of the nanopillars to be uniform.
Dependencies are inferred from the claim text.