Optical displacement measurement system, imaging condition optimization method, and imaging condition optimization program

An imaging condition optimization method of an optical displacement measurement system of an optical cutting method for measuring a profile shape of a measurement target by a triangulation method, the optical displacement measurement system including a light projection unit for radiating light on the measurement target along one direction and a light receiving unit for receiving reflected light from the measurement target and for generating captured image data indicating an image of the measurement target based on an amount of received light, the imaging condition optimization method comprising the steps of:

• setting states of a plurality of imaging parameters for setting an imaging condition;
• controlling the light projection unit and/or the light receiving unit to generate a plurality of pieces of captured image data corresponding respectively to a plurality of imaging conditions by changing a set state of any of the plurality of imaging parameters;
• generating profile data indicating a profile shape based on each piece of generated captured image data;
• and
• calculating, based on each piece of generated profile data or captured image data corresponding to the profile data, a degree of reliability of a profile shape indicated by the profile data.

A non-transitory storage medium comprising instructions which when executed causes a processing device to optimize an imaging condition of an optical displacement measurement system of an optical cutting method for measuring a profile shape of a measurement target by a triangulation method, the optical displacement measurement system including a light projection unit for radiating light on the measurement target along one direction and a light receiving unit for receiving reflected light from the measurement target and for generating captured image data indicating an image of the measurement target based on an amount of received light, the non-transitory storage medium causing the processing device to execute the processes of:

• setting states of a plurality of imaging parameters for setting an imaging condition;
• controlling the light projection unit and/or the light receiving unit to generate a plurality of pieces of captured image data corresponding respectively to a plurality of imaging conditions by changing a set state of any of the plurality of imaging parameters;
• generating profile data indicating a profile shape based on each piece of generated captured image data;
• and
• calculating, based on each piece of generated profile data or captured image data corresponding to the profile data, a degree of reliability of a profile shape indicated by the profile data.