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US 9,866,198 B2Granted
Resonator element, resonator, electronic device, electronic apparatus, and moving object
AssigneeSeiko Epson Corporation
InventorYusuke Yamamoto
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Abstract
A resonator element includes a substrate that vibrates in a thickness shear vibration, a first excitation electrode that is provided on one main surface of the substrate and has a shape in which at least three corners of a virtual quadrangle are cut out, and a second excitation electrode that is provided on the other main surface of the substrate, and a ratio (S2/S1) of an area S1 of the virtual quadrangle and an area S2 of the first excitation electrode satisfies a relationship of 69.2%≦(S2/S1)≦80.1%.
Claims12
A resonator element comprising:
- a substrate that vibrates in a thickness shear vibration and includes a first main surface and a second main surface which are in a front and back relationship to each other;
- a first excitation electrode that is provided on the first main surface;
- and
- a second excitation electrode that is provided on the second main surface, and overlaps the first excitation electrode in a plan view,
- wherein the first excitation electrode is a polygon in a plan view, the polygon corresponding to a quadrangle having at least three truncated corners,
- S1 is an area of the quadrangle,
- S2 is an area of the first excitation electrode, and
- 69.2%≦(S2/S1)≦80.1%.
5 more elements
Dependencies are inferred from the claim text.