Hollow supports and anchors for mechanical resonators
AssigneeThe Regents of the University of California
InventorsClark T.-C. Nguyen, Lingqi Wu
Life of this patent
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Abstract
A micromechanical resonator having one or more anchoring stems which are hollow to increase resonator Q factor. By way of example a micromechanical disk resonator embodiment is shown utilizing a resonant micromechanical disk anchored by a stem between at least one electrode used for input and output. To increase resonator Q, a hollow stem is utilized in which an outer thickness of stem material surrounds a hollow area interior of the stem, or that is fabricated with a plurality of vias and/or fabricated substructures containing hollow spaces in the stem material. Measurements have confirmed that Q values can be increased using the hollow core stems by a factor of 2.9 times in certain implementations and operating modes.
Claims33
A mechanical resonator apparatus, comprising:
- a base layer;
- a mechanical structure with a resonance frequency;
- and
- a stem which anchors and supports said mechanical structure on said base;
- said stem being hollow to suppress resonant energy losses;
- wherein said mechanical resonator is a micromechanical disk resonator.
A mechanical resonator apparatus, comprising:
- a base layer;
- a mechanical structure with a resonance frequency;
- and
- a stem which anchors and supports said mechanical structure on said base;
- said stem being hollow to suppress resonant energy losses;
- wherein said mechanical resonator is a micromechanical ring resonator.
A mechanical resonator apparatus, comprising:
- a base layer;
- a mechanical structure with a resonance frequency;
- and
- a stem which anchors and supports said mechanical structure on said base;
- said stem being hollow to suppress resonant energy losses;
- wherein said mechanical resonator is a micromechanical resonator is a clamped beam resonator.
A mechanical resonator apparatus, comprising:
- a base layer;
- a mechanical structure with a resonance frequency;
- and
- a stem which anchors and supports said mechanical structure on said base;
- said stem being hollow to suppress resonant energy losses;
- wherein said stem is hollow in response to having a plurality of distributed vias and/or substructures containing hollow spaces in the stem.
A mechanical resonator apparatus, comprising:
- a base layer;
- a mechanical structure with a resonance frequency;
- a stem which anchors and supports said mechanical structure on said base;
- said stem being hollow to suppress resonant energy losses;
- and
- supports connecting to one or more said stems, wherein said supports are open concave members or hollow closed structures.
A mechanical resonator apparatus, comprising:
- a base layer;
- a mechanical structure with a resonance frequency;
- a stem which anchors and supports said mechanical structure on said base;
- said stem being hollow to suppress resonant energy losses;
- and
- supports connecting to one or more said stems, wherein said supports are hollow in response to having a plurality of distributed vias and/or substructures containing hollow spaces in the material of said support.
A micro-scale disk resonator apparatus, comprising:
- a base layer;
- a micromechanical disk of a resonant material;
- a stem mechanically anchoring the center of said micromechanical disk to said base layer;
- said stem being hollow to suppress resonant energy losses;
- and
- means of transducing said micromechanical disk of a resonant material.
A micromechanical disk resonator apparatus, comprising:
- a base layer;
- a micromechanical disk of a resonant material that is conductive;
- a stem mechanically anchoring the center of said micromechanical disk to said base layer and adapted for receiving a bias voltage;
- said stem being hollow to suppress resonant energy losses;
- and
- at least one electrode of conductive material surrounding the periphery of said micromechanical disk for receiving an alternating current, and outputting an output current in response to time varying capacitance between said micromechanical disk and said at least one electrode when said micromechanical disk resonates.
Dependencies are inferred from the claim text.