Method for synthesizing a halogen-functionalized carbon material and method for fabricating an electronic device employing the same
AssigneeIndustry-Academic Cooperation Foundation, Yonsei University
InventorsHyungjun Kim, Tae Jin Choi
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Abstract
Provided are methods for synthesizing a halogen-functionalized carbon material and for fabricating an electronic device employing the same. The synthesizing method of the halogen-functionalized carbon material may include thermally treating a transition metal material at a first temperature in a hydrogen atmosphere and thermally treating the transition metal material at a second temperature, which is lower than or equal to the first temperature, while further supplying halocarbon on the transition metal material.
Claims20
A method for synthesizing a halogen-functionalized carbon material, comprising:
- thermally treating a transition metal material at a first temperature in an atmosphere of hydrogen and inert gas;
- and
- thermally treating the transition metal material at a second temperature, which is lower than or equal to the first temperature, while further supplying halocarbon on the transition metal material to grow a halogen-functionalized carbon layer on the transition metal material as a contiguous process.
A method of fabricating an electronic device, comprising
- thermally treating a transition metal material at a first temperature in an atmosphere of hydrogen and inert gas,
- thermally treating the transition metal material at a second temperature lower than or equal to the first temperature, while further supplying halocarbon on the transition metal material, thereby growing a halogen-functionalized carbon layer on the transition metal material as a contiguous process,
- removing the transition metal material from the halogen-functionalized carbon layer,
- transferring the halogen-functionalized carbon layer on a substrate, and
- forming an electrode on the halogen-functionalized carbon layer.
Dependencies are inferred from the claim text.