Method for driving piezoelectric element, piezoelectric element, and piezoelectric element applied device
AssigneeSeiko Epson Corporation
InventorNaoto Yokoyama
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Abstract
A method for driving a piezoelectric element including a first electrode, a piezoelectric layer formed on the first electrode and containing a composite oxide of an ABO3 type perovskite structure, and a second electrode formed on the piezoelectric layer, and the method includes driving the piezoelectric element by applying a signal having a predetermined driving waveform by a predetermined number of times, and driving the piezoelectric element by applying a signal having the predetermined driving waveform in reverse polarity.
Claims9
A method for driving a piezoelectric element including a first electrode, a piezoelectric layer formed on the first electrode and containing a composite oxide of an ABO3 type perovskite structure, and a second electrode formed on the piezoelectric layer, the method comprising:
- driving the piezoelectric element by applying a signal having a predetermined driving waveform by a predetermined number of times;
- and
- driving the piezoelectric element by applying a signal having the predetermined driving waveform in reverse polarity,
- wherein the predetermined driving waveform includes at least a first process of increasing a voltage applied between the first electrode and the second electrode from a first intermediate potential to a first potential, a second process of reducing the voltage applied from the first potential to a second potential, and a third process of returning the voltage applied to the first intermediate potential, and
- wherein the predetermined driving waveform in reverse polarity includes at least a first process of decreasing the voltage applied from a second intermediate potential to a third potential, a second process of increasing the voltage applied from the third potential to a fourth potential, and a third process of returning the voltage applied to the second intermediate potential.
Dependencies are inferred from the claim text.