Back to results
US 9,865,766 B2Granted
Ultraviolet photodetectors and methods of making ultraviolet photodetectors
AssigneeCarrier Corporation
InventorsRhonda R. Willigan, Jose L. Santana, Marcin Piech, Joseph V. Mantese
Life of this patent
Estimating the term…
Abstract
A method of making an ultraviolet sensor includes applying a metal-containing solution to a substrate using a spin coating technique to form a metal-containing coat. The metal-containing coat is baked and pyrolyzed to form a metal-containing oxide film on the substrate. The metal-containing oxide film has a cubic crystalline structure suitable for ultraviolet photodetectors in flame detection applications.
Claims35
A method of making an ultraviolet (UV) photodetector, comprising:
- applying a metal-containing solution to a substrate using a spin coat technique to form a metal-containing coat, wherein the metal-containing solution comprises a stabilizer;
- baking the metal-containing coat;
- pyrolyzing the metal-containing coat to form a metal-containing oxide film according to MgxZn(1-x)O with a cubic crystalline structure;
- and
- calcining the metal-containing oxide film to form a metal-containing oxide layer.
2 more elements
Dependencies are inferred from the claim text.