Making multilayer 3D capacitors using arrays of upstanding rods or ridges
AssigneeInvensas Corporation
InventorsLiang Wang, Rajesh Katkar, Hong Shen, Cyprian Emeka Uzoh
Life of this patent
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Abstract
In one embodiment, a method for making a 3D Metal-Insulator-Metal (MIM) capacitor includes providing a substrate having a surface, forming an array of upstanding rods or ridges on the surface, depositing a first layer of an electroconductor on the surface and the array of rods or ridges, coating the first electroconductive layer with a layer of a dielectric, and depositing a second layer of an electroconductor on the dielectric layer. In some embodiments, the array of rods or ridges can be made of a photoresist material, and in others, can comprise bonded wires.
Claims13
A method for making a capacitor, the method comprising:
- providing a substrate having a surface;
- forming at least one upstanding rod or ridge on the surface;
- depositing a first layer of an electroconductor on the surface and on the at least one rod or ridge;
- coating the first electroconductive layer with a layer of a dielectric;
- and
- depositing a second layer of an electroconductor on the dielectric layer;
- wherein the forming comprises:
- coating the surface of the substrate with a photoresist;
- patterning the photoresist to define the at least one upstanding rod or ridge therein;
- and
- stripping the photoresist from the surface of the substrate so as to leave the at least one rod or ridge upstanding thereon.
A capacitor, comprising:
- a substrate;
- an array of upstanding rods or ridges disposed on a surface of the substrate;
- and
- a sandwich disposed over the surface of the substrate and the array of upstanding rods or ridges, the sandwich comprising at least one layer of a dielectric sandwiched between at least two electroconductive layers;
- wherein at least one of the rods or ridges of the array comprises a photoresist.
A capacitor, comprising:
- a substrate;
- an array of upstanding rods or ridges disposed on a surface of the substrate;
- and
- a sandwich disposed over the surface of the substrate and the array of upstanding rods or ridges, the sandwich comprising at least one layer of a dielectric sandwiched between at least two electroconductive layers;
- wherein the at least one dielectric layer comprises an alkanethiol having a thiol group on both ends;
- wherein the alkanethiol comprises Dithiothreitol (C4H10S2), 1,2-Ethanedithiol (C2H4(SH)2), Biphenyl-4,4′-dithiol (HSC6H4SH), or 1,4-Benzenedimethanethiol (C6H4(CH2SH)2).
Dependencies are inferred from the claim text.