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US 9,865,630 B2Granted
Image sensor pickup region layout
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsDun-Nian Yaung, Ching-Chun Wang, Feng-Chi Hung, Jeng-Shyan Lin, Yan-Chih Lu
Life of this patent
Estimating the term…
Abstract
Embodiments of the present disclosure include an image sensor device and methods of forming the same. An embodiment is an image sensor device including a first plurality of pickup regions in a photosensor array area of a substrate, each of first plurality of pickup regions having a first width and a first length, a second plurality of pickup regions in a periphery area of the substrate, the periphery area along at least one side of the photosensor array area, each of second plurality of pickup regions having a second width and a second length.
Claims19
A device comprising:
- an array of doped pickup regions in a photosensor array area of a top surface of a substrate, the substrate comprising a semiconductor material, the photosensor array area comprising p-type doped well regions and n-type doped well regions in the top surface of the substrate, each of the doped pickup regions of the array of doped pickup regions having a different material composition than the substrate surrounding the corresponding doped pickup region, each of the doped pickup regions of the array of doped pickup regions comprising an n-type or a p-type dopant, the p-type doped pickup regions being in the p-type doped well regions, the n-type doped pickup regions being in the n-type doped well regions, each of the doped pickup regions of the array of doped pickup regions being separated from a nearest adjacent doped pickup region of the array of doped pickup regions by a first spacing;
- and
- a plurality of doped pickup regions in a periphery area of the top surface of the substrate, the periphery area extending along at least two sides of the photosensor array area, the periphery area of the substrate extending from an outer edge of the photosensor array area to an outermost edge of the substrate, each of the doped pickup regions of the plurality of doped pickup regions having a different material composition than the substrate surrounding the corresponding doped pickup region, each of the doped pickup regions of the plurality of doped pickup regions comprising an n-type or a p-type dopant, each of the doped pickup regions of the plurality of doped pickup regions being separated from a nearest adjacent doped pickup region of the plurality of doped pickup regions by a second spacing, the second spacing being smaller than the first spacing.
A method comprising:
- implanting a first dopant in a top surface of a substrate in a photosensor array area of the substrate to form doped well regions in the photosensor array area of the substrate;
- implanting the first dopant in the top surface of the substrate in the doped well regions to form an array of doped pickup regions in the photosensor array area of the substrate, the substrate comprising a semiconductor material, each of the doped pickup regions of the array of doped pickup regions having a different material composition than the substrate surrounding the corresponding doped pickup region, each of the doped pickup regions of the array of doped Pickup regions being separated from a nearest adjacent doped pickup region of the array of doped pickup regions by a first spacing;
- and
- implanting a second dopant in the top surface of the substrate in a periphery area of the substrate to form a plurality of doped pickup regions in the periphery area of the substrate, the periphery area extending along at least two sides of the photosensor array area, the periphery area of the substrate extending from an outer edge of the photosensor array area to an outermost edge of the substrate, each of the doped pickup regions of the plurality of doped pickup regions having a different material composition than the substrate surrounding the corresponding doped pickup region, each of the doped pickup regions of the plurality of doped pickup regions being separated from a nearest adjacent doped pickup region of the plurality of doped pickup regions by a second spacing, the second spacing being smaller than the first spacing.
1 more element
A device comprising:
- an array of doped pickup regions in a photosensor array area of a top surface of a substrate, the substrate comprising a semiconductor material, each of the doped pickup regions of the array of doped pickup regions having a different material composition than the substrate surrounding the corresponding doped pickup region, each of the doped pickup regions of the array of doped pickup regions comprising a first dopant, each of the doped pickup regions in the array of doped pickup regions in the photosensor array area being coupled to a corresponding photodiode, each of the doped pickup regions of the array of doped pickup regions being separated from a nearest adjacent doped pickup region of the array of doped pickup regions by a first spacing;
- and
- a plurality of doped pickup regions in a periphery area of the top surface of the substrate, the periphery area completely surrounding the photosensor array area, the periphery area of the substrate extending from an outer edge of the photosensor array area to an outermost edge of the substrate, the periphery area not including any photodiodes, each of the doped pickup regions of the plurality of doped pickup regions having a different material composition than the substrate surrounding the corresponding doped pickup region, each of the doped pickup regions of the plurality of doped pickup regions comprising a second dopant, each of the doped pickup regions in the array of doped pickup regions being substantially a same size as each of the doped pickup regions in the plurality of doped pickup regions, each of the doped pickup regions of the plurality of doped pickup regions being separated from a nearest adjacent doped pickup region of the plurality of doped pickup regions by a second spacing, the second spacing being smaller than the first spacing.
Dependencies are inferred from the claim text.