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US 9,865,448 B2Granted
Excimer light source
AssigneeUltraviolet Sciences, Inc.
InventorsJames Randall Cooper, Ronald W. Chaffee
Life of this patent
Estimating the term…
Abstract
A light source, with electrodes of alternating polarity attached to a substrate in an excimer ultraviolet (UV) lamp, for generating a plasma discharge between each of the electrodes. The shape of the substrate can shape and control the plasma discharge to reduce exposure of materials susceptible to attack by the halogens. The electrodes can be located such that the plasma discharge occurs in a region where it produces less contact of the halogens with the vulnerable areas of the lamp enclosure. The materials, such as the electrodes, substrate, and envelope, can be selected to withstand corrosive materials. In another embodiment, a plurality of sealed tubes, at least some of which contain an excimer gas are positioned between two electrodes.
Claims34
An ultraviolet (UV) excimer lamp comprising:
- an envelope;
- an excimer gas contained within an interior section of the envelope;
- at least one first elongated electrode positioned within the interior section of the envelope and extending along the length of the envelope;
- and
- at least one second elongated electrode positioned within the interior section of the envelope and extending along the length of the envelope, and substantially parallel to said at least one first elongated electrode,
- wherein the at least one first elongated electrode and the at least one second elongated electrode have a potential difference between them, the potential difference creating a plasma discharge between the at least one first elongated electrode and the at least one second elongated electrode;
- wherein the at least one first elongated electrode and the at least one second elongated electrode or one or more substrates to which the at least one first elongated electrode and at least one second elongated electrode are attached comprise or are coated with a material resistant to halogen erosion;
- wherein a pressure of the excimer gas multiplied by a smallest distance between the first elongated electrode and the second elongated electrode or a smallest distance between a coated surface covering the first elongated electrode and a coated surface covering the second elongated electrode is in the range of 0.1 Torr-cm to 5000 Torr-cm.
5 more elements
A system for treating a fluid comprising:
- a treatment chamber coupled to a fluid inlet and a fluid outlet;
- and
- at least one excimer gas discharge light source wherein the light source is configured to expose a fluid passing through the treatment chamber to radiation,
- wherein each light source comprises:
- an envelope;
- an excimer gas contained within an interior section of the envelope;
- at least one first elongated electrode positioned within the interior section of the envelope and extending along the length of the envelope;
- and
- at least one second elongated electrode positioned within the interior section of the envelope and extending along the length of the envelope, and substantially parallel to said at least one first elongated electrode,
- wherein the at least one first elongated electrode and the at least one second elongated electrode have a potential difference between them, the potential difference creating a plasma discharge between the at least one first elongated electrode and the at least one second elongated electrode;
- wherein the at least one first elongated electrode and the at least one second elongated electrode or one or more substrates to which the at least one first elongated electrode and at least one second elongated electrode are attached comprise or are coated with a material resistant to halogen erosion;
- wherein a pressure of the excimer gas multiplied by a smallest distance between the first elongated electrode and the second elongated electrode or a smallest distance between a coated surface covering the first elongated electrode and a coated surface covering the second elongated electrode is in the range of 0.1 Torr-cm to 5000 Torr-cm.
9 more elements
A method for purifying fluids of contaminants comprising:
- producing light using an excimer gas discharge light source, the light having wavelengths in the range of 100 nm-400 nm;
- and
- exposing a fluid to the light,
- wherein the excimer gas discharge light source used to produce the light comprises:
- an envelope;
- an excimer gas contained within a closed interior section of the envelope;
- at least one first elongated electrode positioned within the closed interior section of the envelope and extending along the length of the envelope;
- and
- at least one second elongated electrode positioned within the closed interior section of the envelope and extending along the length of the envelope, and substantially parallel to said at least one first elongated electrode,
- wherein the at least one first elongated electrode and the at least one second elongated electrode have a potential difference between them, the potential difference creating a plasma discharge between the at least one first elongated electrode and the at least one second elongated electrode;
- wherein the at least one first elongated electrode and the at least one second elongated electrode or one or more substrates to which the at least one first elongated electrode and at least one second elongated electrode are attached comprise or are coated with a material resistant to halogen erosion;
- wherein a pressure of the excimer gas multiplied by a smallest distance between the first elongated electrode and the second elongated electrode or a smallest distance between a coated surface covering the first elongated electrode and a coated surface covering the second elongated electrode is in the range of 0.1 Torr-cm to 5000 Torr-cm.
9 more elements
Dependencies are inferred from the claim text.