Integrated reciprocal space mapping for simultaneous lattice parameter refinement using a two-dimensional X-ray detector
OwnerJonathan Gienckeinventor
Life of this patent
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Abstract
A method for performing an X-ray diffraction analysis of a crystal sample using a multi-dimensional detector that integrates an X-ray diffraction signal while the position of the sample relative to an X-ray source is changed along a scan direction. The resulting image is compressed along the scan direction, but may be collected very quickly. The capture of both on-axis and off-axis reflections in a single image provides a common spatial frame of reference for comparing the reflections. This may be used in the construction of a reciprocal space map, and is useful for analyzing a sample with multiple crystal layers, such as a crystal substrate with a crystalline film deposited thereupon.
Claims16
A method of performing an X-ray diffraction analysis of a crystal sample, the method comprising:
- illuminating the sample with an X-ray beam from an X-ray source;
- detecting a diffracted X-ray signal emitted from the sample with a multi-dimensional X-ray detector having a fixed position relative to the X-ray source;
- and
- changing the position of the sample relative to the X-ray source along a scan direction while integrating the diffracted X-ray signal with the detector so as to produce a multi-dimensional image that is compressed in the scan direction, said multi-dimensional image including both on-axis reflections, which lie along a central axis of detection in the multi-dimensional image, and off-axis reflections, which are offset from the central axis.
A method of performing an X-ray diffraction analysis of a sample having a plurality of crystal layers each with a different crystalline structure, the method comprising:
- illuminating the sample with an X-ray beam from an X-ray source;
- detecting a diffracted X-ray signal emitted from the sample with a multi-dimensional X-ray detector having a fixed position relative to the X-ray source, such that portions of the diffracted X-ray signal originating from each of the crystal layers are detected at different respective spatial positions on the X-ray detector;
- changing the position of the sample relative to the X-ray source along a scan direction while integrating the detected X-ray reflection signal with the detector so as to produce a multi-dimensional image that is compressed in the scan direction, said multi-dimensional image including both on-axis reflections, which lie along a central axis of detection in the multi-dimensional image, and off-axis reflections, which are offset from the central axis;
- and
- comparing the reflections within the multi-dimensional image that originate from the different crystal layers to determine a corresponding spatial relationship between the crystalline structures of said layers.
An analysis system for performing an X-ray diffraction analysis of a crystal sample, the system comprising:
- an X-ray source that illuminates the sample with an X-ray beam;
- a multi-dimensional detector that detects a diffracted X-ray signal emitted from the sample, the detector having a fixed position relative to the X-ray source;
- and
- a scan mechanism that changes the position of the sample relative to the X-ray source along a scan direction while the diffracted X-ray signal is integrated by the detector so as to produce a multi-dimensional image that is compressed in the scan direction, said multi-dimensional image including both on-axis reflections, which lie along a central axis of detection in the multi-dimensional image, and off-axis reflections, which are offset from the central axis.
Dependencies are inferred from the claim text.