X-ray transmission inspection apparatus

An X-ray transmission inspection apparatus comprising:

• an X-ray source configured to irradiate a sample with an X-ray;
• a detector configured to be disposed on a side opposite to the X-ray source with respect to the sample and to detect the X-ray which is transmitted through the sample using a phosphor;
• a shield member configured to be arranged to face a detection surface of the detector and to block a part of the X-ray to partially form a detection area and a shield area on the detection surface, the detection area on which the X-ray is irradiated, and the shield area being shielded from the X-ray;
• and
• a shield moving mechanism that operates to perform a switching sequence including:
• moving the shield member relative to the detector from a first position to a second position, wherein the first position is a position at which the detection surface of the detector is divided into an initial detection area and an initial shield area, and wherein the second position is a position at which at least a part of the initial detection area becomes a new shield area and at least a part of the initial shield area becomes a new detection area;
• and
• maintaining the shield member at the second position for a time period that is long enough to restore the phosphor used in the detector within the initial detection area while allowing the detector to detect the X-ray with the detection surface that has become the new detection area.