Reconfigurable device for terahertz (THz) and infrared (IR) filtering and modulation
AssigneeThe Regents of the University of Michigan
InventorsMona Jarrahi, Mehmet Unlu, Christopher W. Berry, Shenglin Li
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Abstract
A reconfigurable device for terahertz (THz) or infrared (IR) ranges that includes a base substrate, a lower array attached to the base substrate, and an upper array attached to the base substrate and at least partially suspended over the lower array. Activation of the reconfigurable device causes the upper array to mechanically flex towards the lower array so that electrical contact is made therebetween. Methods of fabricating and operating the reconfigurable device are also provided.
Claims14
An electromagnetic wave modulator for use with incident terahertz (THz) or infrared (IR), electromagnetic waves, comprising:
- a base substrate;
- a lower array attached to the base substrate, the lower array comprising conductive elements arranged in a mesh or periodic configuration that forms a metallic structure having discontinuities;
- and
- an upper array attached to the base substrate and at least partially suspended over the lower array, the upper array comprising conductive elements located above the discontinuities in the metallic structure of the lower array;
- wherein the electromagnetic wave modulator has sub-wavelength spacing between at least some of the conductive elements of the upper array, the lower array, or both, relative to a wavelength of the incident THz or IR electromagnetic waves;
- wherein activation of the electromagnetic wave modulator causes the upper array to mechanically flex towards the lower array so that electrical contact is made between the conductive elements of the upper and lower arrays, wherein the electrical contact eliminates the discontinuities in the metallic structure so as to alter the magnetic response of the electromagnetic wave modulator to the incident THz or IR electromagnetic waves.
A method of fabricating a electromagnetic wave modulator for use with incident terahertz (THz) or infrared (IR), electromagnetic waves, comprising the steps of:
- providing a base substrate;
- fabricating a lower array on the base substrate using a plurality of stationary conductive elements arranged in a mesh or periodic configuration that forms a metallic structure having discontinuities;
- and
- fabricating an upper array with a plurality of flexible conductive elements supported on the base substrate, wherein the plurality of flexible conductive elements from the upper array are fabricated so that they are at least partially suspended over the plurality of stationary conductive elements from the lower array, the flexible conductive elements including contacts positioned above the stationary conductive elements of the lower array such that when the flexible conductive elements are mechanically flexed towards the lower array, electrical contact is made between the contacts of the flexible conductive elements and the stationary conductive elements of the lower array so as to eliminate the discontinuities in the metallic structure;
- and
- wherein the electromagnetic wave modulator has sub-wavelength spacing between at least some of the conductive elements of the upper array, the lower array, or both, relative to a wavelength of the incident THz or IR electromagnetic waves.
A method of operating a electromagnetic wave modulator for use with incident terahertz (THz) or infrared (IR) electromagnetic waves, comprising the steps of:
- providing an electromagnetic wave modulator having a lower array and an upper array configured as a plurality of unit cells;
- applying an electrical voltage to the electromagnetic wave modulator;
- and
- rearranging the structural configuration of the plurality of unit cells in response to the applied electrical voltage so that the collective magnetic response of the electromagnetic wave modulator to an incident electromagnetic wave in the terahertz (THz) or infrared (IR) range is altered.
Dependencies are inferred from the claim text.