MEMS-sensor
AssigneeTronics Microsystems S.A.
InventorsFrançois-Xavier Boillot, Rémi Laoubi
Life of this patent
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Abstract
A sensor which measures parameters such as acceleration, rotation and magnetic field comprises a substrate defining a plane and at least one sensing plate suspended above the substrate for movement in a sensing direction orthogonal to the substrate plane. A detection arm suspended above the substrate is rotational about an axis parallel to the substrate plane. An out-of-plane coupling structure couples the sensing plate to the detection arm for generating rotational movement of the detection arm, which is detected by a rotation detection structure. A pivot element arranged at a distance from the coupling structure facilitates tilting movement of the sensing plate.
Claims21
A sensor for measuring physical parameters such as acceleration, rotation, magnetic field, comprising
- a) a substrate defining a substrate plane,
- b) at least one sensing plate suspended above the substrate for performing a movement having at least a first component in a sensing direction, wherein the sensing direction is orthogonal to the substrate plane,
- c) at least one detection arm that is suspended above the substrate for performing a rotational movement about a rotation axis parallel to the substrate plane,
- d) an out-of-plane coupling structure for coupling the first component of the movement of said sensing plate to said detection arm for generating the rotational movement of the detection arm,
- e) a rotation detection structure cooperating with the detection arm for detecting the rotational movement of the detection arm with respect to the substrate plane,
- f) characterized by a pivot element arranged at a distance from the out-of-plane coupling structure, said pivot element coupling the sensing plate to a geometric reference plane, which is at a fixed distance above the substrate, so that the sensing plate performs a tilting out-of-plane movement.
Dependencies are inferred from the claim text.