Gas laser device and control method therefor
AssigneeGigaphoton Inc.
InventorsTakeshi Asayama, Hiroaki Tsushima, Kouji Kakizaki, Osamu Wakabayashi
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Abstract
A gas laser apparatus includes a chamber containing a laser gas, a pair of electrodes disposed within the chamber, a fan disposed within the chamber, a motor connected to a rotating shaft of the fan, and a rotating speed control unit configured to control a rotating speed of the fan based on a wear-out parameter of the pair of electrodes.
Claims14
A gas laser apparatus comprising:
- a chamber containing a laser gas;
- a pair of electrodes disposed within the chamber;
- a fan disposed within the chamber;
- a motor connected to a rotating shaft of the fan;
- and
- a rotating speed control unit configured to control a rotating speed of the fan based on a wear-out parameter of the pair of electrodes to increase the rotating speed as the pair of electrodes wear out.
A gas laser apparatus comprising:
- a chamber containing a laser gas;
- a pair of electrodes disposed within the chamber;
- a fan disposed within the chamber;
- a motor connected to a rotating shaft of the fan;
- an electrode moving mechanism configured to move a first one of the pair of electrodes toward a second one of the pair of electrodes;
- and
- a rotating speed control unit configured to control a rotating speed of the fan based on a distance between the pair of electrodes calculated after the first one of the pair or electrodes is moved by the electrode moving mechanism to increase the rotating speed as the distance between the pair of electrodes increases.
A method for controlling a gas laser apparatus, the gas laser apparatus including a chamber containing a laser gas, a pair of electrodes disposed within the chamber, a fan disposed within the chamber, and a motor connected to a rotating shaft of the fan,
- the method comprising:
- calculating a distance between the pair of electrodes based on a wear-out parameter of the pair of electrodes;
- and
- controlling a rotating speed of the fan based on the distance between the pair of electrodes to increase the rotating speed as the distance between the pair of electrodes increases.
Dependencies are inferred from the claim text.