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US 9,853,233 B2Granted
Functionalization of a substrate
AssigneeOTI Lumionics Inc.
InventorsMichael Helander, Zhibin Wang, Jacky Qiu, Zheng-Hong Lu
Life of this patent
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Abstract
A method of increasing a work function of an electrode is provided. The method comprises obtaining an electronegative species from a precursor using electromagnetic radiation and reacting a surface of the electrode with the electronegative species. An electrode comprising a functionalized substrate is also provided.
Claims8
An apparatus for functionalizing a substrate with an electronegative species, the apparatus comprising:
- a reaction chamber for receiving a precursor and the substrate, the precursor containing the electronegative species;
- a first electrode and a second electrode disposed within the reaction chamber, at least one of the first electrode and the second electrode being adapted to be connected to a power source to generate a plasma for obtaining the electronegative species from the precursor for bonding with the substrate to increase the work function of the substrate;
- and
- a plasma shield configured to prevent at least a portion of the plasma generated in the region between the second electrode and the plasma shield from directly impinging on the substrate;
- and one or more members electrically connecting the first electrode and the plasma shield.
2 more elements
Dependencies are inferred from the claim text.