Method of manufacturing pressure sensor, deposition system, and annealing system

A deposition system comprising:

• a substrate holder holding a substrate;
• and
• a deposition portion performing deposition on the substrate held by the substrate holder,
• the substrate holder comprising,
• a support mechanism supporting the substrate, and
• a holding mechanism holding the substrate,
• the support mechanism comprising a first movable support member and a second movable support member which are arranged in a first direction, the first movable support member and the second movable support member extending in a second direction crossing the first direction,
• the first movable support member and the second movable support member being movable in a third direction crossing the first and the second directions,
• the first movable support member and the second movable support member having first surfaces facing the substrate, and
• the first surface having a curved surface or a knife edge structure formed in an angular shape.

A deposition system comprising:

• a substrate holder holding a substrate;
• and
• a deposition portion performing deposition on the substrate held by the substrate holder,
• the substrate holder comprising,
• a support mechanism supporting the substrate, and
• a holding mechanism holding the substrate,
• the support mechanism comprising a first movable support member and a second movable support member which are arranged in a first direction,
• widths of the first movable support member and the second movable support member in a second direction crossing the first direction being larger than widths of the first movable support member and the second movable support member in the first direction, and
• the first movable support member and the second movable support member being movable in a third direction crossing the first and the second directions.