Method for manufacturing nano-structured semiconductor light-emitting element
AssigneeSamsung Electronics Co., Ltd.
InventorsNam-Goo Cha, Dong-Ho Kim, Geon-Wook Yoo
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AssigneeSamsung Electronics Co., Ltd.
InventorsNam-Goo Cha, Dong-Ho Kim, Geon-Wook Yoo
Estimating the term…
There is provided a method for manufacturing a nanostructure semiconductor light emitting device, including: forming a mask having a plurality of openings on a base layer; growing a first conductivity-type semiconductor layer on exposed regions of the base layer such that the plurality of openings are filled, to form a plurality of nanocores; partially removing the mask such that side surfaces of the plurality of nanocores are exposed; heat-treating the plurality of nanocores after partially removing the mask; sequentially growing an active layer and a second conductivity-type semiconductor layer on surfaces of the plurality of nanocores to form a plurality of light emitting nanostructures, after the heat treatment; and planarizing upper parts of the plurality of light emitting nanostructures such that upper surfaces of the nanocores are exposed.
A core-shell structure semiconductor light emitting device, comprising:
Dependencies are inferred from the claim text.