US 9,853,173 B2 · Semiconductor structure with two optically coupled optical resonant cavities and method of manufacturing such a structure

Abstract

The invention relates to a semiconductor structure intended to receive an electromagnetic wave. The semiconductor structure comprises at least one first semiconductor resonant optical cavity conformed to absorb at least partially the electromagnetic wave and to provide an electrical signal proportional to the part of the electromagnetic wave absorbed. The semiconductor structure further includes a second dielectric resonant optical cavity of which a resonance wavelength is comprised in the predetermined range of wavelengths and is preferentially equal to the wavelength λ0, the second resonant optical cavity being laid out to intercept at least part of the electromagnetic wave and being optically coupled to the first resonant optical cavity. The second resonant optical cavity is transparent to the predetermined range of wavelengths. The invention further relates to a semiconductor component comprising such a semiconductor structure and a method of manufacturing such a semiconductor structure.

Claims11

Dependent claims

A semiconductor structure capable of absorbing an electromagnetic wave in a predetermined range of wavelengths which is centered around a wavelength λ0, the semiconductor structure comprising:

at least one first semiconductor resonant optical cavity comprising a first resonance wavelength, the first resonance wavelength being comprised in the predetermined range of wavelengths, the first resonant optical cavity being configured to absorb at least partially the electromagnetic wave and to provide an electrical signal proportional to the absorbed part of the electromagnetic wave,
wherein the semiconductor structure further comprises:
a second dielectric resonant optical cavity comprising a second resonance wavelength, the second resonance wavelength being comprised in the predetermined range of wavelengths, the second resonant optical cavity being configured to intercept at least part of the electromagnetic wave and being optically coupled to the first resonant optical cavity,
the second resonant optical cavity being transparent to the predetermined range of wavelengths, wherein the second resonant optical cavity comprises an optical index N2 less than 2.

1 more element

A method of manufacturing a semiconductor structure capable of absorbing an electromagnetic wave in a predetermined range of wavelengths which is centered around a wavelength λ0,

the method comprising the following steps:
supplying at least one first semiconductor resonant optical cavity comprising a first resonance wavelength, the first resonance wavelength being comprised in the predetermined range of wavelengths, the first resonant optical cavity being configured to absorb at least partially the electromagnetic wave and to provide an electrical signal proportional to the absorbed part of the electromagnetic wave,
supplying a second dielectric resonant optical cavity comprising a second resonance wavelength, the second resonant wavelength being comprised in the range of wavelengths, the second resonant optical cavity being configured to intercept part of the electromagnetic wave and being optically coupled to the first resonant optical cavity,
wherein the second resonant optical cavity is transparent to the predetermined range of wavelengths and wherein the second resonant optical cavity comprises an optical index N2 less than 2.

1 more element

Dependencies are inferred from the claim text.

Semiconductor structure with two optically coupled optical resonant cavities and method of manufacturing such a structure

Life of this patent

Semiconductor structure with two optically coupled optical resonant cavities and method of manufacturing such a structure

Life of this patent

Abstract

Claims11