Fabrication of an isolated dummy fin between active vertical fins with tight fin pitch
AssigneeInternational Business Machines Corporation
InventorsKangguo Cheng, Peng Xu
Life of this patent
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Abstract
A method of forming an arrangement of active and inactive fins on a substrate, including forming at least three vertical fins on the substrate, forming a protective liner on at least three of the at least three vertical fins, removing at least a portion of the protective liner on the one of the at least three of the at least three of vertical fins, and converting the one of the at least three of the at least three vertical fins to an inactive vertical fin.
Claims13
A method of forming an arrangement of active and inactive fins on a substrate, comprising:
- forming at least three vertical fins on the substrate;
- forming a protective liner on at least three of the at least three vertical fins;
- removing at least a portion of the protective liner on at least one of the at least three of the at least three vertical fins;
- and
- converting the at least one of the at least three of the at least three vertical fins to an inactive vertical fin, wherein the at least one of the at least three of the at least three vertical fins is converted to an inactive vertical fin by oxidizing or nitriding the at least one vertical fin.
A method of forming an arrangement of active and inactive fins on a substrate, comprising:
- forming at least three vertical fins on the substrate;
- forming a protective liner on at least three of the at least three vertical fins;
- forming a filler layer on the at least three of the at least three vertical fins;
- forming a masking layer on at least a portion of the filler layer, wherein at least a portion of the protective liner on one of the at least three of the at least three vertical fins is exposed;
- removing at least a portion of the protective liner on the one of the at least three of the at least three vertical fins;
- and
- converting at least a portion of the one of the at least three of the at least three vertical fins to an inactive vertical fin, wherein at least a portion of the one of the at least three of the at least three vertical fins is converted to an inactive vertical fin by oxidizing or nitriding the one vertical fin.
Dependencies are inferred from the claim text.