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US 9,853,042 B2Granted
Semiconductor device and method of manufacturing the same
AssigneeSK hynix Inc.
InventorJong Man Kim
Life of this patent
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Abstract
The semiconductor device includes a stacked structure having alternately stacked conductive patterns and interlayer insulating patterns, a through-hole passing through the stacked structure, a channel pattern formed in the through-hole and protruding from an inside of the through hole over the through-hole, and a capping conductive pattern formed to be in contact with the protruded channel pattern and have a width greater than the through-hole.
Claims13
A semiconductor device, comprising:
- a stacked structure including alternately stacked conductive patterns and interlayer insulating patterns;
- a through-hole passing through the stacked structure;
- a channel pattern formed in the through-hole and protruding from an inside of the through hole over the through-hole;
- and
- a capping conductive pattern having a first surface being in contact with a second surface of the protruded channel pattern and formed to have a width greater than the through-hole,
- wherein the first surface and the second surface are parallel to a direction in which the conductive patterns and the interlayer insulating patterns are stacked, and
- wherein the protruded channel pattern extends to pass through an upper surface and a bottom surface of the capping conductive pattern.
4 more elements
Dependencies are inferred from the claim text.