Fin field effect transistor
AssigneeSemiconductor Manufacturing International (Shanghai) Corporation
InventorsMieno Fumitake, Jianhua Ju
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AssigneeSemiconductor Manufacturing International (Shanghai) Corporation
InventorsMieno Fumitake, Jianhua Ju
Estimating the term…
Various embodiments provide semiconductor devices and methods for forming the same. A first fin and a second fin are formed on a semiconductor substrate. A first dielectric layer is formed on the semiconductor substrate and has a top surface lower than a top surface of both of the first fin and the second fin. A gate structure is formed on the first dielectric layer and covering across a first portion of each of the first fin and the second fin. A second portion of the first fin on both sides of the gate structure is removed, forming a first recess. A first semiconductor layer is formed in the first recess. A second dielectric layer is formed on the first dielectric layer and the first semiconductor layer, and exposes a top surface of the second fin. A second semiconductor layer is formed on the exposed top surface of the second fin.
A semiconductor device, comprising:
Dependencies are inferred from the claim text.