Connecting techniques for stacked CMOS devices
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsHsiang-Jen Tseng, Wei-Yu Chen, Ting-Wei Chiang, Li-Chun Tien
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsHsiang-Jen Tseng, Wei-Yu Chen, Ting-Wei Chiang, Li-Chun Tien
Estimating the term…
In some embodiments, the present disclosure relates to an integrated chip having an inter-tier interconnecting structure having horizontal components, which is arranged within a semiconductor substrate and configured to electrically couple a first device tier to a second device tier. The integrated chip has a first device tier with a first semiconductor substrate. A first inter-tier interconnecting structure is disposed inside the first semiconductor substrate. The first inter-tier interconnecting structure has a first segment extending in a first direction and a second segment protruding outward from a sidewall of the first segment in a second direction substantially perpendicular to the first direction. A second device tier is electrically coupled to the first device tier by the first inter-tier interconnecting structure.
An integrated circuit (IC), comprising:
An integrated circuit (IC), comprising:
An integrated circuit (IC), comprising:
Dependencies are inferred from the claim text.