Circulating cooling/heating device
AssigneeKELK Ltd.
InventorDaisuke Goto
Life of this patent
Estimating the term…
Abstract
A circulating cooling/heating device that is configured to cool and heat a circulating fluid supplied to a chamber in plasma-etching equipment includes: a reservoir configured to store the circulating fluid; a pump configured to circulate the circulating fluid between the reservoir and the chamber; a heat exchanger configured to perform heat exchange between the circulating fluid and a cooling water, the heat exchanger being immersed in the circulating fluid stored in the reservoir; and a heater configured to heat the circulating fluid in the reservoir.
Claims12
A circulating cooling/heating device configured to cool and heat a circulating fluid supplied to a chamber in plasma-etching equipment, the circulating cooling/heating device comprising:
- a reservoir configured to store the circulating fluid;
- a pump configured to circulate the circulating fluid between the reservoir and the chamber;
- a heat exchanger configured to perform heat exchange between the circulating fluid and a cooling water, the heat exchanger being immersed in the circulating fluid stored in the reservoir and comprising an outlet configured to release the circulating fluid to an inside of the reservoir;
- and
- a heater configured to heat the circulating fluid in the reservoir,
- wherein the heat exchanger is connected to a first inflow path and configured to receive the circulating fluid through the first inflow path, and
- wherein a second inflow path is branched from the first inflow path and configured to directly release the circulating fluid from the first inflow path into the reservoir.
A circulating cooling/heating device configured to cool and heat a circulating fluid supplied to a chamber in plasma-etching equipment, the circulating cooling/heating device comprising:
- a reservoir configured to store the circulating fluid;
- a pump configured to circulate the circulating fluid between the reservoir and the chamber;
- a heat exchanger positioned within the reservoir and configured to be immersed in the circulating fluid stored in the reservoir, the heat exchanger being configured to receive a cooling water through a cooling water inflow path and to perform heat exchange between the received cooling water and the circulating fluid;
- and
- a heater configured to heat the circulating fluid in the reservoir,
- wherein the heat exchanger is further configured to receive the circulating fluid through a first inflow path that is separate from the cooling water inflow path, and
- wherein the first inflow path includes a second inflow path that is configured to receive circulating fluid from the first inflow path and to release the received circulating fluid into the reservoir.
Dependencies are inferred from the claim text.