Annular cooling fluid passage for magnets
AssigneeVarian Semiconductor Equipment Associates, Inc.
InventorsScott Barraclough, James S. Buff
Life of this patent
Estimating the term…
Abstract
A magnet having an annular coolant fluid passage is generally described. Various examples provide a magnet including a first magnet and a second magnet disposed around an ion beam coupler with an aperture there through. The first and second magnets each including a metal core having a cavity therein, one or more conductive wire wraps disposed around the metal core, and an annular core element configured to be inserted into the cavity, wherein an annular coolant fluid passage is formed between the cavity and the annular core element. Furthermore, the annular core element may have a first diameter and a middle section having a second diameter, the second diameter being less than the first diameter. Other embodiments are disclosed and claimed.
Claims20
An apparatus comprising:
- an ion source configured to emit an ion beam;
- a magnet operable with the ion source, the magnet comprising:
- a metal core having a cavity;
- a plurality of conductive wire wraps disposed around the metal core;
- and
- an annular core element configured to be received within the cavity, the annular core element further configured to form an annular coolant fluid passage between the cavity and the annular core element, wherein the annular core element has an external coolant fluid opening, an internal coolant fluid opening disposed in a middle section, and an internal coolant fluid passage connecting the external coolant fluid opening and the internal coolant fluid opening;
- and
- a coolant fluid reservoir containing a coolant fluid and connected to the annular coolant fluid passage.
An apparatus comprising:
- a magnet operable with an ion source, the magnet comprising:
- a metal core having a cavity;
- a plurality of conductive wire wraps disposed around the metal core;
- and
- an annular core element configured to be received within the cavity, the annular core element further configured to form an annular coolant fluid passage between the cavity and the annular core element, wherein the annular core element has an external coolant fluid opening, an internal coolant fluid opening disposed in a middle section, and an internal coolant fluid passage connecting the external coolant fluid opening and the internal coolant fluid opening;
- and
- a coolant fluid reservoir containing a coolant fluid and connected to the annular coolant fluid passage.
An ion implantation apparatus, comprising:
- an ion source;
- a magnet positioned downstream of the ion source in a direction of travel of an ion beam emitted from the ion source, the magnet comprising:
- an ion beam coupling having an aperture;
- a first magnet disposed adjacent to the ion beam coupling;
- and
- a second magnet disposed adjacent to the ion beam coupling and the first magnet, the first and second magnets each including:
- a metal core having a cavity therein;
- a plurality of conductive wire wraps disposed around the metal core;
- and
- an annular core element configured to be received within the cavity, the annular core element configured to form an annular coolant fluid passage between the metal core and the annular core element, wherein the annular core element has an external coolant fluid opening, an internal coolant fluid opening disposed in the middle section, and an internal coolant fluid passage connecting the external coolant fluid opening and the internal coolant fluid opening;
- and
- a coolant fluid reservoir containing a coolant fluid and connected to the annular coolant fluid passage.
Dependencies are inferred from the claim text.