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AssigneeCommissariat A L'energie Atomique Et Aux Energies Alternatives
InventorsOlivier Delferriere, Olivier Tuske, Francis Harrault
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An electron cyclotron resonance ion generator device includes a metal tube subjected to a first potential and pierced by a first cavity forming a plasma chamber intended to contain a plasma; a second cavity forming a waveguide configured to inject a high frequency wave into the plasma chamber, an extraction system including an upstream end connected to the plasma chamber and a downstream end configured to be connected to an ion transport line, the connecting flange being subjected to a second potential, a magnetic field generator, and a ceramic tube in contact with the metal tube, the ceramic tube surrounding the metal tube and at least a part of the extraction system.
An electron cyclotron resonance ion generator device comprising:
Dependencies are inferred from the claim text.
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From the US filing history. Foreign family members aren’t listed.
Using high-frequency excitation, e.g. microwave excitation: with an applied axial magnetic field
Ion sources; Ion guns: details
Details: extraction optics, e.g. grids
Electric discharge tubes or discharge lamps
About 9 years 9 months of term left · ends 21 Jul 2036 (estimated)
This application claims priority to French Patent Application No. 1556871, filed Jul. 21, 2015, the entire content of which is incorporated herein by reference in its entirety.
The present invention relates to an electron cyclotron resonance ion generator device, and more precisely an ECR (electron cyclotron resonance) type ion source.
In a known manner, electron cyclotron resonance devices, also known as ECR sources, are used to produce mono-charged or multi-charged ions (i.e. atoms from which one or more electrons have been torn off).
Other characteristics and advantages of the invention will become clearer from reading the detailed description that follows, with reference to the appended figures, which illustrate:
FIG. 1, a section view of a device according to an embodiment of the invention;
FIG. 2, a perspective view of the device of FIG. 1 in section;
For greater clarity, identical or similar elements are marked by identical reference signs in all of the figures.
An electron cyclotron resonance ion generator device according to an embodiment of the invention will now be described with reference to FIGS. 1 to 5.
This device comprises a metal tube 1. The metal tube 1 extends along a reference axis 2. The metal tube 1 has a symmetry of revolution with respect to the reference axis 2. The metal tube 1 comprises an upstream end 5 and a downstream end 6. The metal tube 1 may for example be made of copper.