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US 9,851,555 B2Granted
Optical component
AssigneeCarl Zeiss SMT GmbH
InventorsMarkus Holz, Benjamin Sigel, Jan Horn, Benedikt Knauf, Fabian Haacker
Life of this patent
Estimating the term…
Abstract
An optical component includes at least one micro-opto-electro-mechanical system (MOEMS) with a front side and a rear side. The optical component also includes at least one printed circuit board arranged on the rear side of the at least one MOEMS. The at least one printed circuit board has lateral contacts. The at least one printed circuit board may be equipped with electronic parts and cooling elements. The at least one MOEMS projects laterally beyond the at least one printed circuit board.
Claims20
An optical component, comprising:
- a micro-opto-electro-mechanical system (MOEMS) having a front side and a rear side;
- a printed circuit board supported by the rear side of the MOEMS;
- and
- a cover,
- wherein:
- the MOEMS, the printed circuit board and the cover delimit a cavity;
- the MOEMS delimits a first side of the cavity;
- the cover delimits a second side of the cavity in a vacuum-tight manner;
- the first side of the cavity is opposite the second side of the cavity;
- and
- the printed circuit board delimits a third side of the cavity which is between the first and second sides of the cavity.
8 more elements
An optical component, comprising:
- a micro-opto-electro-mechanical system (MOEMS) having a front side and a rear side;
- a printed circuit board supported by the rear side of the MOEMS;
- and
- a cover,
- wherein:
- the printed circuit board, the MOEMS and the cover delimit a vacuum-tight cavity;
- the MOEMS delimits a first side of the cavity;
- the cover delimits a second side of the cavity which is opposite the first side of the cavity;
- the printed circuit board delimits a third side of the cavity which is between the first and second sides of the cavity.
6 more elements
Dependencies are inferred from the claim text.