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US 9,851,554 B2Granted
Method for displacing at least one optical component
AssigneeCarl Zeiss SMT GmbH
InventorsStefan Krone, Lars Berger
Life of this patent
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Abstract
A method for displacing an optical component is disclosed, in which the electrical power maximally required when displacing the component is less than the sum of the maximum electrical powers of the at least two actuators used for the displacement.
Claims19
A method, comprising:
- providing a mechatronic system comprising an optical element that is displaceable via at least two electrical actuators, the optical component having at least two degrees of freedom of displacement;
- predefining a maximum power permitted to be consumed by all of the at least two electrical actuators together at an arbitrary point in time during the displacement of the optical component, the maximum power being less than a sum of maximum powers of all the individual electrical actuators of the at least two electrical actuators;
- ascertaining a drive protocol for displacing the optical component from a first position to a second position along a trajectory while complying with the predefined maximum power;
- and
- displacing the optical component via the at least two electrical actuators according to the driving protocol.
2 more elements
An optical assembly, comprising:
- a mechatronic system, comprising:
- an optical component having at least two degrees of freedom of displacement;
- and
- at least two electrical actuator devices configured to displace the optical component from a first position to a second position along a trajectory;
- and
- a control device configured to control displacement of the optical element via the at least two electrical actuator devices,
- wherein:
- the optical assembly is configured so that the optical component is displaceable via controlled activation of the at least two electrical actuator devices into a predefined set of displacement positions and/or along a predefined set of trajectories;
- the mechatronic system is configured so that a maximum total power consumption of the at least two electrical actuator devices when displacing the optical component into the predefined displacement positions and/or along the predefined trajectories is at most equal in magnitude to a predefined maximum power;
- and
- the maximum power is less than a sum of maximum powers of all the individual electrical actuators of the at least two electrical actuators.
8 more elements
Dependencies are inferred from the claim text.