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US 9,851,503 B2Granted
Compact and low loss Y-junction for submicron silicon waveguide
AssigneeElenion Technologies, LLC
InventorsYang Liu, Yangjin Ma, Ruizhi Shi, Michael J. Hochberg, Yi Zhang, Shuyu Yang, Thomas Wetteland Baehr-Jones
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Abstract
A compact, low-loss and wavelength insensitive Y-junction for submicron silicon waveguides. The design was performed using FDTD and particle swarm optimization (PSO). The device was fabricated in a 248 nm CMOS line. Measured average insertion loss is 0.28±0.02 dB across an 8-inch wafer. The device footprint is less than 1.2 μm×2 μm, orders of magnitude smaller than MMI and directional couplers.
Claims11
A submicron optical splitter device comprising:
- an input port for inputting a beam of light in a propagation direction;
- first and second output ports for outputting first and second portions of the beam of light;
- a tapered section divided into a plurality of segments between the input port and the output port;
- wherein the segments increase in width from the input port to a maximum width proximate a half-way point of the tapered section;
- wherein the segments decrease in width towards the first and second output ports, whereby the maximum width is greater than the width of the segment proximate the two output ports.
2 more elements
Dependencies are inferred from the claim text.