Electromigration testing of interconnect analogues having bottom-connected sensory pins

A method for electromigration testing, the method comprising:

• causing a current to flow through a conductive member;
• and
• determining a resistance of at least one portion of the conductive member using at least one measurement device, and wherein:
• a cap layer of insulative material is disposed over at least a portion of a top surface of the conductive member,
• a plurality of sensory pins is disposed along a length of the conductive member between a first end of the conductive member and a second end of the conductive member,
• each sensory pin of the plurality of sensory pins is conductively connected to a bottom surface of the conductive member,
• each at least one portion of the conductive member includes at least one sensory pin of the plurality of the sensory pins,
• the at least one measurement device is conductively connected to at least one sensory pin of the plurality of sensory pins, and
• a switch is conductively connected to the at least one measurement device and each sensory pin of the plurality of sensory pins, wherein the switch selectively allows an electrical connection between a measurement device of the at least one measurement device, a first structure, and a second structure, and wherein the measurement device determines a resistance of a portion of the conductive member that is between the first structure and the second structure.

An apparatus for electromigration testing, the apparatus comprising:

• a plurality of conductive members embedded in a substrate, wherein each conductive member of the plurality of conductive member comprises:
• a first end conductively connected to a first active via;
• a second end conductively connected to a second active via;
• and
• a plurality of sensory pins disposed along a length of the conductive member between the first end and the second end of the conductive member, wherein each sensory pin has a first end that is conductively connected to a bottom surface of the conductive member, and wherein each sensory pin has a second end that is at least partially exposed;
• at least one measurement device conductively connected to at least one sensory pin of the plurality of sensory pins, wherein the at least one measurement device determines a resistance of at least one portion of the conductive member;
• and
• a switch conductively connected to the at least one measurement device and each sensory pin of the plurality of sensory pins, wherein the switch selectively allows an electrical connection between a measurement device of the at least one measurement device, a first structure, and a second structure, and wherein the measurement device determines a resistance of a portion of the conductive member that is between the first structure and the second structure.