Gas sensor package
AssigneeLG Innotek Co., Ltd.
InventorsJee Heum Paik, Ji Hun Hwang
Life of this patent
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Abstract
A gas sensor package is configured such that an output change part is provided in the gas sensor package including a gas sensor so that a resistance output mode can be changed to a voltage output mode, thereby enabling the gas sensor to have a regular initial voltage value by compensating a resistance change value to an initial gas sensing material. According to embodiments of the present application, a gas sensor package is configured such that a gas moving separation part is formed between a gas sensing element and a substrate with regard to a structure in which a gas sensing element is mounted to the substrate in a flip chip bonding method so that gas can be smoothly moved and thus gas sensing efficiency can be maximized.
Claims14
A gas sensor package, comprising:
- a first substrate including metal patterns;
- and
- a gas sensing element mounted to the first substrate, wherein the gas sensing element includes:
- a body having a cavity part configured for accommodating gas at an upper portion of the body;
- a bonding pattern disposed on a lower surface of the body, and the bonding pattern connected to the metal patterns;
- a gas sensing part disposed on the body and configured to communicate with the cavity part and including a gas sensing material;
- and
- a cover member configured to cover an upper surface of the cavity part and an upper surface of the body,
- wherein the gas sensing part is face to face with a top surface of the first substrate,
- wherein a first through hole is provided in the first substrate to align in a vertical line with the gas sensing part;
- wherein the gas sensing part is exposed through the first through hole,
- wherein the first through hole has a width that is smaller than a width of the gas sensing part,
- wherein the cover member includes:
- a first portion disposed on the upper surface of the body, and
- a second portion disposed on the upper surface of the cavity part, and having a flat upper surface and a curved lower surface, and
- wherein the lower surface of the second portion is positioned at a lower level than the upper surface of the body.
Dependencies are inferred from the claim text.