Photopatternable glass micro electrochemical cell and method
AssigneeMaxim Integrated Products, Inc.
InventorsDan G. Allen, Anand Chamakura, Christopher F. Edwards
Life of this patent
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Abstract
A micro electrochemical cell, a micro electrochemical gas sensor, and a method for fabrication of the micro electrochemical cell are described that include a photopatternable glass substrate, two or more embedded electrodes integrated with through-glass vias, and a gas-permeable membrane lid. In an implementation, a micro electrochemical cell includes a photopatternable glass substrate; at least one recess formed in the photopatternable glass substrate; a plurality of through-glass vias formed in the photopatternable glass substrate, at least one electrolyte disposed in the at least one recess; a wicking layer disposed over the at least one electrolyte; and a lid assembly.
Claims15
A micro electrochemical cell, comprising:
- a substantially planar photopatternable glass substrate having a first side and a second side;
- at least one recess formed in the first side of the photopatternable glass substrate, where the glass substrate and the recess form a cell body, and where the recess includes surface corrugation to provide electrode sensing surface area;
- a plurality of through-glass vias formed in the photopatternable glass substrate, the through-glass vias extending from the first side of the photopatternable glass to the second side of the photopatternable glass;
- a plurality of electrodes electrically connected to at least one through-glass via, where the at least one through-glass via forms an electrical connection from the plurality of the electrodes to the second side of the photopatternable glass;
- at least one electrolyte disposed in the at least one recess;
- a lid assembly disposed on the cell body and over the at least one recess, the lid assembly including a lid substrate including an aperture, the aperture including a gas permeable region.
A micro electrochemical system, comprising:
- an application specific integrated circuit;
- and
- a micro electrochemical cell electrically coupled to the application specific integrated circuit, the micro electrochemical cell including a substantially planar photopatternable glass substrate having a first side and a second side;
- at least one recess formed in the first side of the photopatternable glass substrate, where the glass substrate and the recess form a cell body, and where the recess includes surface corrugation to provide electrode sensing surface area;
- a plurality of through-glass vias formed in the photopatternable glass substrate, the through-glass vias extending from the first side of the photopatternable glass to the second side of the photopatternable glass;
- a plurality of electrodes electrically connected to at least one through-glass via, where the at least one through-glass via forms an electrical connection from the plurality of the electrodes to the second side of the photopatternable glass;
- at least one electrolyte disposed in the at least one recess;
- a lid assembly disposed on the cell body and over the at least one recess, the lid assembly including
- a lid substrate including an aperture, the aperture including a gas permeable region, and
- a porous membrane disposed between the aperture and the at least one recess.
Dependencies are inferred from the claim text.