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US 9,851,313 B2Granted
Quantitative X-ray analysis—ratio correction
AssigneePANalytical B.V.
InventorsWaltherus Van Den Hoogenhof, Charalampos Zarkadas
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Abstract
A method of X-ray analysis measures X-ray diffraction in transmission. In order to carry out quantitative measurements, a background measurement is taken slightly away from the diffraction peak and the ratio of measured intensities used to correct for variations in sample composition.
Claims9
A method of X-ray analysis comprising:
- making an X-ray diffraction measurement in transmission by directing X-rays from an X-ray source at an energy E onto a sample at an incident angle ψ1 to the surface of the sample and measuring a diffraction intensity Id(θd) of the diffracted X-rays at the energy E with a X-ray detector at an exit angle ψ2 to the surface of the sample, a difference 2θd between the incident angle and the exit angle corresponding to an X-ray diffraction peak of a predetermined component;
- and
- making a correction measurement of X-rays by measuring a background intensity of X-rays Id(θbg) at the energy E, with the difference 2θbg between the incident angle and the exit angle deviating by 0.2 to 5° from the difference 2θd corresponding to the X-ray diffraction peak;
- and
- calculating the quantity of the predetermined component from the intensity ratio Id(θfl)/ Id(θbg) of the diffraction intensity and the background intensity.
2 more elements
Dependencies are inferred from the claim text.