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US 9,851,272 B2Granted
Pressure sensor diaphragm
AssigneeViatran Corporation
InventorsSurinder Sood, Joel D. Neri, William Wilson
Life of this patent
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Abstract
A pressure sensor includes a pre-formed diaphragm located at the distal end of a pressure sensor. The diaphragm has a convex surface on a first side of the diaphragm which is exposed to a fluid to be measured. A strain gauge is attached to a second surface on the opposite side of the diaphragm. The diaphragm may be deformed to have the convex curvature on the first surface, and heat treated.
Claims14
A pressure sensor diaphragm comprising:
- a pre-formed metal diaphragm having a first surface on a first side of the diaphragm, and a second surface on a second, opposite side of the diaphragm, wherein the first surface has a convex curvature and the second surface has a concave curvature;
- and
- a strain gauge attached to the second surface of the diaphragm, wherein the strain gauge is operable to measure strain of the diaphragm when the strain gauge is attached to only the second surface of the diaphragm, and wherein the diaphragm has a maximum operable pressure of at least 50 pounds per square inch.
A pressure sensor comprising:
- a housing having a proximal end and a distal end;
- a pre-formed metal diaphragm having a first surface on a first side of the diaphragm, and a second surface on a second, opposite side of the diaphragm, the diaphragm being attached to the distal end of the housing, the diaphragm arranged such that the first surface defines a distal end of the pressure sensor and the second surface is oriented toward an interior space of the housing, wherein the first surface has a convex curvature and the second surface has a concave curvature;
- a strain gauge attached to the second surface of the diaphragm, wherein the strain gauge is operable to measure strain of the diaphragm when the strain gauge is attached to only the second surface of the diaphragm;
- and
- a lead electrically coupled to the strain gauge and extending along the interior space of the housing, wherein the pressure sensor has a maximum operable pressure of at least 50 pounds per square inch.
2 more elements
Dependencies are inferred from the claim text.