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US 9,851,251 B2Granted
Spectrometer
AssigneeMICRO-EPSILON Optronic GmbH
InventorTobias Otto
Life of this patent
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Abstract
The invention relates to a spectrometer comprising a combination of at least one grid (1) and at least one prism (2), characterized in that total reflexion is used to produce a compact spectrometer in at least one prism (2).
Claims8
A compact spectrometer comprising:
- a reflection grating (1);
- and
- at least one prism (2) in combination with the at least one grating (1),
- wherein:
- beginning of total reflection is provided in the at least one prism (2) in order to achieve the compact spectrometer and a splitting of incident and reflected rays of the reflection grating (1), and
- the at least one prism (2) is positioned in such a manner that a light beam passes through the at least one prism (2) twice, and
- wherein at least one of:
- characteristics of the spectrometer are linear in the circular wave number,
- the spectrometer compensates a dispersion-induced non-linear relationship between wavelength and focal point of a confocal chromatic measurement system such that overall characteristics of the spectrometer become linear in the object distance, or
- the spectrometer characteristics are linear in the wavelength.
7 more elements
Dependencies are inferred from the claim text.