Vibration sensor with bonded drive
AssigneeVEGA Grieshaber KG
InventorHolger Gruhler
Life of this patent
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Abstract
Vibration sensor comprising a membrane, which can be excited to vibrate by means of a drive, wherein the drive has at least one piezo actuator, which is designed so as to be bonded with the membrane, wherein the membrane has at least one centering device that is designed to be suitable for orienting and keeping the drive centered relative to the membrane.
Claims18
A vibration sensor comprising a membrane, which is excited to vibrate by means of a drive, wherein the drive has at least one piezo actuator and at least one adaptor ceramic element, and is designed to be bonded with the membrane, wherein the membrane has at least one centering device that is designed so as to be suitable for centering the drive relative to the membrane, wherein one or more of the membrane, the adaptor ceramic element and the piezo actuator have a surface structure that is configured so as to be suitable to promote the spread of the adhesive between the membrane and the adaptor ceramic element or between the adaptor ceramic element and the piezo actuator.
A production method for a vibration sensor comprising a membrane that is excited to vibrate by means of a drive, wherein the drive and the membrane are bonded to one another, and the drive has at least one piezo actuator, said production method comprising the steps:
- arranging in a centered manner the drive on the membrane,
- introducing an adhesive into a space, adjacent to the drive and the membrane, whereby the adhesive is distributed between these elements due to a capillary action, and
- curing the adhesive.
Dependencies are inferred from the claim text.