Apparatus and method for forming lubricant recess having minute configuration in curved inner surface

An apparatus for forming lubricant recesses having minute configurations on a curved inner surface, the apparatus comprising:

• a cleaning unit for cleaning the curved inner surface;
• a photoresist layer formation unit for applying a photosensitive material on the cleaned curved inner surface to form a photoresist layer;
• a photomask placing unit for disposing a photomask having a configuration which conforms with the configuration of lubricant recesses proximate to the photoresist layer;
• an exposure unit for exposing the photoresist layer through the photomask;
• a developing unit for developing the exposed photoresist layer;
• an etching unit for selectively etching the curved inner surface exposed by the developing unit to form a lubricant recess pattern onto the curved inner surface;
• and
• a delaminating unit for separating or removing the photoresist layer remained on the curved inner surface;
• and
• wherein the photoresist layer formation unit comprises:
• a deformable coating cup for applying a photosensitive material along the curved inner surface, wherein the coating cup comprises a flexible dish-shaped portion and a protruding central portion projecting upward from the dish-shaped portion, wherein the dish-shaped portion comprises an edge configured to contact the curved inner surface;
• a quantitative injection unit for quantitatively supplying the liquid photosensitive material onto the protruding central portion of the coating cup to flow into and at least partially fill the dish-shaped portion thereof with the liquid photosensitive material;
• a driving unit for moving the coating cup with respect to the curved inner surface;
• and
• an extension unit for connecting the coating cup to the driving unit, and
• wherein a plurality of coating cups, quantitative injection units, driving units, and extension units are connected in parallel to transfer the liquid photosensitive material from the edges of the flexible dish-shaped portions of the coating cups to the curved inner surfaces and substantially uniformly apply the photosensitive material on a plurality of curved inner surfaces.