Ion implantation for modification of thin film coatings on glass
AssigneeIntevac, Inc.
InventorsTerry Bluck, Babak Adibi
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Abstract
The use of non-mass analyzed ion implanter is advantageous in such application as it generates ion implanting at different depth depending on the ions energy and mass. This allows for gaining advantage from lubricity offered as a result of the very light deposition on the surface, and at the same time the hardness provided by the intercalated ions implanted below it, providing benefits for cover glass, low E enhancement, and other similar materials. In further aspects, ion implantation is used to create other desirable film properties such anti-microbial and corrosion resistance.
Claims10
A low-E glass panel comprising:
- a glass panel;
- a low emissivity coating having a top surface exposed to surrounding environment;
- a plurality of ions implanted to intercalate among molecular species to a defined depth below the top surface of the low emissivity coating, wherein the ions are selected from at least one of:
- Zr, Ag, Al, Ti, and Hydrogen.
A low-E glass panel comprising:
- a glass panel;
- a low emissivity coating;
- a lubricious layer comprising ions deposited onto top surface of the low emissivity coating;
- and,
- a plurality of ions implanted to intercalate among molecular species to a defined depth below the top surface of the low emissivity coating, wherein the ions are selected from at least one of:
- Zr, Ag, Al, Ti, and Hydrogen.
A low-E glass panel comprising:
- a glass panel;
- a low emissivity coating having a top surface facing surrounding environment;
- a plurality of silver ions implanted to intercalate among molecular species of the low emissivity coating to a defined depth below the top surface of the low emissivity coating, thereby forming an anti-microbial layer on the top surface.
A low-E glass panel comprising:
- a glass panel;
- a low emissivity coating having a top surface facing surrounding environment;
- a plurality of aluminum ions implanted to intercalate among molecular species of the low emissivity coating to a defined depth below the top surface of the low emissivity coating, thereby improving the UV reflectance of the low emissivity coating.
Dependencies are inferred from the claim text.