Aqueous working fluid
AssigneeIdemitsu Kosan Co., Ltd.
InventorTomohiko Kitamura
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Abstract
A water-soluble working fluid of the invention is used for cutting a brittle material using a wire saw. The water-soluble working fluid is provided by blending water, alkylene oxide adduct of acethylene glycol, and glycols. The water-soluble working fluid of the invention is capable of providing favorable cutting accuracy when the brittle material is cut using a wire, and thus is suitable for cutting out a large-diameter wafer. The water-soluble working fluid of the invention is especially suitably applicable to an abrasive-grain-fixed wire saw.
Claims9
A water-soluble working fluid adapted to be used for cutting a brittle material using a wire saw, the working fluid comprising:
- 50 mass % or more of water relative to a total amount of the working fluid;
- an alkylene oxide adduct of acetylene glycol;
- and
- at least one non-polymeric glycol.
Dependencies are inferred from the claim text.