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US 9,850,161 B2Granted
Fluoride glazes from fluorine ion treatment
AssigneeApplied Materials, Inc.
InventorsChengtsin Lee, Jennifer Y. Sun
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Abstract
An article comprises a body having a coating. The coating comprising a mixture of a first oxide and a second oxide. The coating includes a glaze on a surface of the coating, the glaze comprising a eutectic system having a super-lattice of a first fluoride and a second fluoride.
Claims11
A method comprising:
- forming an article or a coating comprising an initial mixture comprising a first oxide and a second oxide;
- heating the article or coating to a treatment temperature of at least 910° C.;
- exposing the article or coating to anhydrous hydrogen fluoride gas at the treatment temperature of at least 910° C., wherein exposure of the article or coating to the anhydrous hydrogen fluoride gas at the temperature of at least 910° C. causes:
- replacement of oxygen molecules in the first oxide and the second oxide with fluorine molecules at a surface of the article or the coating;
- transformation of the initial mixture comprising the first oxide and the second oxide into a final mixture comprising a first fluoride and a second fluoride at the surface of the article or the coating;
- formation of a eutectic system from the final mixture, the eutectic system having a super-lattice of the first fluoride and the second fluoride at the surface of the article or the coating;
- and
- formation of a glaze from the eutectic system at the surface of the article or the coating.
5 more elements
Dependencies are inferred from the claim text.