Unit control panel, substrate transfer test method, and substrate processing apparatus

A unit control panel provided in at least one of units of a substrate processing apparatus, the substrate processing apparatus processing a substrate with transferring the substrate between the units assembled together, comprising

• a test control section configured to perform a substrate transfer test for a unit provided with the unit control panel using a substrate table which is installed outside the unit while the unit is not assembled together with another unit, the test control section configured to determine whether a major failure occurs in the unit executing the substrate transfer test,
• wherein the substrate processing apparatus includes a polishing unit configured to polish the substrate and mount the polished substrate on a temporary table, and a cleaning unit configured to clean and dry the substrate mounted on the temporary table, and the unit control panel is provided in the cleaning unit,
• the substrate table is installed for the substrate transfer test instead of the temporary table at a location where the temporary table is located when the polishing unit and the cleaning unit are assembled together, and
• the test control section of the unit control panel provided in the cleaning unit performs the substrate transfer test by receiving the substrate mounted on the substrate table and transporting the substrate into the cleaning unit by a substrate transport mechanism which is provided in the cleaning unit.

A unit control panel provided in at least one of units of a substrate processing apparatus, the substrate processing apparatus processing a substrate with transferring the substrate between the units assembled together, comprising

• a test control section configured to perform a substrate transfer test for a unit provided with the unit control panel using a substrate table which is installed outside the unit while the unit is not assembled together with another unit, the test control section configured to determine whether a major failure occurs in the unit executing the substrate transfer test,
• wherein the substrate processing apparatus includes a polishing unit configured to polish the substrate, a cleaning unit configured to clean and dry the substrate polished by the polishing unit, and a loading/unloading unit configured to load the substrate onto a lifter in the polishing unit and unload the substrate mounted on a substrate drying module in the cleaning unit, and the unit control panel is provided in the loading/unloading unit,
• the substrate table is installed for the substrate transfer test instead of the lifter at a location where the lifter is located when the polishing unit and the loading/unloading unit are assembled together and is installed for the substrate transfer test instead of the drying module at a location where the drying module is located when the cleaning unit and the loading/unloading unit are assembled together, and
• the test control section of the unit control panel provided in the loading/unloading unit performs the substrate transfer test by transporting the substrate placed in the loading/unloading unit to the substrate table and mounting the substrate on the substrate table by a substrate transport mechanism which is provided in the loading/unloading unit and receiving the substrate mounted on the substrate table and transporting the substrate into the loading/unloading unit by the transport mechanism.

A substrate transfer test method in at least one of units of a substrate processing apparatus, the substrate processing apparatus processing a substrate with transferring the substrate between the units assembled together, comprising:

• installing a substrate table outside the at least one unit while the at least one unit is not assembled together with another unit;
• performing a substrate transfer test for the at least one unit using the substrate table;
• and
• determining whether a major failure occurs in the unit executing the substrate transfer test,
• wherein the substrate transfer test is performed by:
• selecting a scenario for which a transport route for the substrate is presented as a plurality of blocks;
• selecting a scenario start position from which transport of the substrate is to be started by selecting any one of the blocks;
• receiving the number of repetitions of the selected scenario;
• and
• transferring the substrate based on the selected scenario and the received number of repetitions of the selected scenario.

A substrate transfer test method in at least one of units of a substrate processing apparatus, the substrate processing apparatus processing a substrate with transferring the substrate between the units assembled together, comprising:

• installing a substrate table outside the at least one unit while the at least one unit is not assembled together with another unit;
• performing a substrate transfer test for the at least one unit using the substrate table;
• and
• determining whether a major failure occurs in the unit executing the substrate transfer test,
• wherein the substrate processing apparatus includes a polishing unit configured to polish the substrate and mount the polished substrate on a temporary table and a cleaning unit configured to clean and dry the substrate mounted on the temporary table, and the substrate transfer test is performed in the cleaning unit,
• the substrate table is installed for the substrate transfer test instead of the temporary table at a location where the temporary table is located when the polishing unit and the cleaning unit are assembled together, and
• the substrate transfer test is performed by receiving the substrate mounted on the substrate table and transporting the substrate into the cleaning unit by a substrate transport mechanism which is provided in the cleaning unit.

A substrate transfer test method in at least one of units of a substrate processing apparatus, the substrate processing apparatus processing a substrate with transferring the substrate between the units assembled together, comprising:

• installing a substrate table outside the at least one unit while the at least one unit is not assembled together with another unit;
• performing a substrate transfer test for the at least one unit using the substrate table;
• and
• determining whether a major failure occurs in the unit executing the substrate transfer test,
• wherein the substrate processing apparatus includes a polishing unit configured to polish the substrate, a cleaning unit configured to clean and dry the substrate polished by the polishing unit, and a loading/unloading unit configured to load the substrate onto a lifter in the polishing unit and unload the substrate mounted on a substrate drying module in the cleaning unit, and the substrate transfer test is performed in the loading/unloading unit,
• the substrate table is installed for the substrate transfer test instead of the lifter at a location where the lifter is located when the polishing unit and the loading/unloading unit are assembled together and is installed for the substrate transfer test instead of the drying module at a location where the drying module is located when the cleaning unit and the loading/unloading unit are assembled together, and
• the substrate transfer test is performed by transporting the substrate placed in the loading/unloading unit to the substrate table installed instead of the lifter and mounting the substrate on the substrate table by a substrate transport mechanism which is provided in the loading/unloading unit and receiving the substrate mounted on the substrate table installed instead of the drying module and transporting the substrate into the loading/unloading unit by the transport mechanism.

A substrate processing apparatus for processing a substrate, comprising:

• at least one unit which is each provided with a unit control panel, the unit including a test control section configured to perform a substrate transfer test for the unit using a substrate table which is installed outside the unit while the unit is not assembled together with another unit, the test control section configured to determine whether a major failure occurs in the unit executing the substrate transfer test;
• and
• another unit which is to be assembled together with the unit,
• wherein the substrate processing apparatus processes a substrate and transfers the substrate between the unit and another unit assembled together,
• wherein the substrate transfer test is performed by:
• selecting a scenario for which a transport route for the substrate is presented as a plurality of blocks;
• selecting a scenario start position from which transport of the substrate is to be started by selecting any one of the blocks;
• receiving the number of repetitions of the selected scenario;
• and
• transferring the substrate based on the selected scenario and the received number of repetitions of the selected scenario.

A substrate processing apparatus for processing a substrate, comprising:

• at least one unit which is each provided with a unit control panel, the unit including a test control section configured to perform a substrate transfer test for the unit using a substrate table which is installed outside the unit while the unit is not assembled together with another unit, the test control section configured to determine whether a major failure occurs in the unit executing the substrate transfer test;
• and
• another unit which is to be assembled together with the unit,
• wherein the substrate processing apparatus processes a substrate and transfers the substrate between the unit and another unit assembled together,
• wherein the substrate processing apparatus comprises a polishing unit configured to polish the substrate and mount the polished substrate on a temporary table, and a cleaning unit configured to clean and dry the substrate mounted on the temporary table, and the unit control panel is provided in the cleaning unit,
• the substrate table is installed for the substrate transfer test instead of the temporary table at a location where the temporary table is located when the polishing unit and the cleaning unit are assembled together, and
• the test control section of the unit control panel provided in the cleaning unit performs the substrate transfer test by receiving the substrate mounted on the substrate table and transporting the substrate into the cleaning unit by a substrate transport mechanism which is provided in the cleaning unit.

A substrate processing apparatus for processing a substrate, comprising:

• at least one unit which is each provided with a unit control panel, the unit including a test control section configured to perform a substrate transfer test for the unit using a substrate table which is installed outside the unit while the unit is not assembled together with another unit, the test control section configured to determine whether a major failure occurs in the unit executing the substrate transfer test;
• and
• another unit which is to be assembled together with the unit,
• wherein the substrate processing apparatus processes a substrate and transfers the substrate between the unit and another unit assembled together,
• wherein the substrate processing apparatus comprises a polishing unit configured to polish the substrate, a cleaning unit configured to clean and dry the substrate polished by the polishing unit, and a loading/unloading unit configured to load the substrate onto a lifter in the polishing unit and unload the substrate mounted on a substrate drying module in the cleaning unit, and the unit control panel is provided in the loading/unloading unit,
• the substrate table is installed for the substrate transfer test instead of the lifter at a location where the lifter is located when the polishing unit and the loading/unloading unit are assembled together and is installed for the substrate transfer test instead of the drying module at a location where the drying module is located when the cleaning unit and the loading/unloading unit are assembled together, and
• the test control section of the unit control panel provided in the loading/unloading unit performs the substrate transfer test by transporting the substrate placed in the loading/unloading unit to the substrate table and mounting the substrate on the substrate table by a substrate transport mechanism which is provided in the loading/unloading unit and receiving the substrate mounted on the substrate table and transporting the substrate into the loading/unloading unit by the transport mechanism.