Trihalosilane refining device having divided wall distillation column

A trihalosilane refining device comprising:

• a divided wall distillation column having an upper column region, a preliminary separation region, a main separation region and a lower column region formed therein and comprising an inlet port installed to introduce a feed containing a trihalosilane into the preliminary separation region, a first outlet port, a second outlet port and a third outlet port;
• and
• a first distillation column coupled to the divided wall distillation column,
• wherein the inlet port is installed at a 1/10 to 5/10 section of the preliminary separation region and wherein the second outlet port is formed at a 6/9 to 8/9 section of a divided wall section of the main separation region, and
• wherein the divided wall distillation column is a tray type designed to have a plate number so that a separation efficiency can be maintained at a level from 50% to 80% with respect to a theoretical plate number.