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US 9,845,248 B2Granted
Process and apparatus for preparation of octachlorotrisilane
AssigneeEvonik Degussa GmbH
InventorsJuergen Erwin Lang, Hartwig Rauleder, Ekkehard Mueh, Imad Moussallem
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Abstract
The invention relates to a process and an apparatus for controlled preparation of octachlorotrisilane from monomeric chlorosilanes, by subjecting the chlorosilanes to a thermal plasma.
Claims12
A process for preparing octachlorotrisilane, the process comprising
- subjecting chlorosilanes comprising at least one monomeric chlorosilane of formula I in the absence of hydrogen to a thermal plasma:
- HxSiCl4−x (I),
- where x is independently selected from 0, 1, 2 and 3.
Dependencies are inferred from the claim text.