Method and device for stringing substrates together in coating systems
AssigneeSingulus Technologies AG
InventorsWolfgang Becker, Edgar Rüth, Jochen Heilingbrunner
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AssigneeSingulus Technologies AG
InventorsWolfgang Becker, Edgar Rüth, Jochen Heilingbrunner
Estimating the term…
A method and a device for stringing together objects in transport systems, preferably in coating systems, for adjusting the distance between two objects, preferably substrates or substrate holders, being arranged one behind the other, wherein the front object moves at a process speed vp in the transport system and the rear object is at an undefined distance from the front object. The method comprises the following steps: (a) accelerating the rear substrate to an initial speed vx>vp; (b) detecting an increase in the driving torque when the rear substrate moves against the front substrate; (c) delaying the rear substrate by a predetermined value in order to establish a predetermined distance ap from the front substrate; and (d) adjusting the speed of the rear substrate to the process speed vp.
A method for stringing together objects in a transport system and for adjusting an adjustable distance between two of the objects, wherein the two of the objects comprise a rear object arranged behind front object, wherein the front object moves at a speed in the transport system defined as a process speed vp, and wherein the adjustable distance between the rear object and the front object is initially an undefined distance, the method comprising the following steps:
Dependencies are inferred from the claim text.