Piezoelectric device, liquid ejecting head, and liquid ejecting apparatus
AssigneeSeiko Epson Corporation
InventorsEiju Hirai, Motoki Takabe, Katsutomo Tsukahara, Yoichi Naganuma, Munehide Saimen
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AssigneeSeiko Epson Corporation
InventorsEiju Hirai, Motoki Takabe, Katsutomo Tsukahara, Yoichi Naganuma, Munehide Saimen
Estimating the term…
A piezoelectric device includes an actuator substrate that includes a plurality of piezoelectric element rows having a plurality of piezoelectric elements, and a wiring substrate that is disposed so as to face the actuator substrate. The piezoelectric element rows include a common electrodes common to the plurality of the piezoelectric elements. The actuator substrate includes a plurality of first common wirings connected to each of the common electrodes of the plurality of the piezoelectric element rows. The wiring substrate includes a plurality of second common wirings connected to each of the first common wirings of the plurality of piezoelectric element rows, and a plurality of auxiliary wirings buried in a groove portion formed in the wiring substrate. The auxiliary wirings are connected to each of the second common wirings, and the plurality of auxiliary wirings are not connected to each other.
A piezoelectric device comprising:
Dependencies are inferred from the claim text.