Method for manufacturing power module substrate
AssigneeMitsubishi Materials Corporation
InventorsNobuyuki Terasaki, Yoshiyuki Nagatomo
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Abstract
A method for manufacturing a power module substrate includes a first lamination step of laminating a ceramic substrate and a copper sheet through an active metal material and a filler metal having a melting point of 660° C. or lower on one surface side of the ceramic substrate; a second lamination step of laminating the ceramic substrate and an aluminum sheet through a bonding material on the other surface side of the ceramic substrate; and a heating treatment step of heating the ceramic substrate, the copper sheet, and the aluminum sheet laminated together, and the ceramic substrate and the copper sheet, and the ceramic sheet and the aluminum sheet are bonded at the same time.
Claims20
A method for manufacturing a power module substrate including a ceramic substrate, a circuit layer formed of a copper sheet bonded onto one surface of the ceramic substrate, and a metal layer formed of an aluminum sheet bonded onto the other surface of the ceramic substrate, the method comprising:
- a first lamination step of laminating the copper sheet on the one surface of the ceramic substrate through an active metal material and a filler metal, the filler metal having a melting point of 600° C. or lower;
- a second lamination step of laminating the aluminum sheet on the other surface of the ceramic substrate through a bonding material;
- and
- a heating treatment step of heating the ceramic substrate, the copper sheet, and the aluminum sheet laminated together at a heating temperature of 650° C. or lower in a state of being pressurized in the lamination direction at 1 kgf/cm2 to 35 kgf/cm2, wherein
- the ceramic substrate and the copper sheet, and the ceramic sheet and the aluminum sheet are bonded at the same time, and
- the filler metal does not come into direct contact with the copper sheet.
A method for manufacturing a power module substrate including a ceramic substrate, a circuit layer formed of a copper sheet bonded onto one surface of the ceramic substrate, and a metal layer formed of an aluminum sheet bonded onto the other surface of the ceramic substrate, the method comprising:
- a first lamination step of laminating the copper sheet on the one surface of the ceramic substrate through an active metal material and a filler metal, the filler metal having a melting point of 600° C. or lower;
- a second lamination step of laminating the aluminum sheet on the other surface of the ceramic substrate through a bonding material;
- and
- a heating treatment step of heating the ceramic substrate, the copper sheet, and the aluminum sheet laminated together at a heating temperature of 650° C. or lower, wherein
- the ceramic substrate and the copper sheet, and the ceramic sheet and the aluminum sheet are bonded at the same time;
- wherein at the first lamination step of laminating the active metal material is disposed on the copper sheet, and the filler metal is disposed on the ceramic substrate;
- the active metal material is selected from a group consisting of one or more active elements of Ti, Zr, Nb, and Hf, and
- the filler metal does not come into direct contact with the copper sheet.
Dependencies are inferred from the claim text.